Computed Tomographic Spectral Imaging: 3D STEM-EDS Spectral Imaging
نویسندگان
چکیده
منابع مشابه
Tomographic Spectral Imaging with Multivariate Statistical Analysis: Comprehensive 3D Microanalysis.
A comprehensive three-dimensional (3D) microanalysis procedure using a combined scanning electron microscope (SEM)/focused ion beam (FIB) system equipped with an energy-dispersive X-ray spectrometer (EDS) has been developed. The FIB system was used first to prepare a site-specific region for X-ray microanalysis followed by the acquisition of an electron-beam generated X-ray spectral image. A sm...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2007
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927607071851